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Contact-Less Electrical Defect Characterization of Semi-Insulating 6H-SiC Bulk Material
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
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2009 (English)In: Materials Science Forum Vols. 600-603, Trans Tech Publications , 2009, 405-408 p.Conference paper, Published paper (Refereed)
Abstract [en]

The novel technique microwave detected photo induced current transient spectroscopy (MD-PICTS) was applied to semi-insulating 6H-SiC in order to investigate the properties of inherent defect levels. Defect spectra can be obtained in the similar way to conventional PICTS and DLTS. However, there is no need for contacting the samples, which allows for non-destructive and spatially resolved electrical characterization. This work is focused on the investigation of semi-insulating 6H-SiC grown under different C/Si-ratios. In the corresponding MD-PICTS spectra several shallow defect levels appear in the low temperature range. However the peak assignment needs further investigation. Additionally different trap reemission dynamics are obtained for higher temperatures, which are supposed to be due to different compensation effects.

Place, publisher, year, edition, pages
Trans Tech Publications , 2009. 405-408 p.
National Category
Natural Sciences Condensed Matter Physics
Identifiers
URN: urn:nbn:se:liu:diva-41964DOI: 10.4028/www.scientific.net/MSF.600-603.405Local ID: 59424OAI: oai:DiVA.org:liu-41964DiVA: diva2:262819
Conference
12th International Conference on Silicon Carbide and Related Materials, ICSCRM 2007; Otsu; Japan
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2014-10-08

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Beyer, FranziskaGällström, AndreasCarlsson, PatrickHenry, AnneMagnusson, BjörnJanzén, Erik

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