A FEM-based application for numerical calculations of ellipsometric data
2008 (English)In: Physica Status Solidi (a) applications and materials science, ISSN 1862-6300, Vol. 205, no 4, 945-948 p.Article in journal (Refereed) Published
For modeling of advanced optical structures there is a need for stronger and more flexible modeling tools. Our aim is to develop and verify an application tool for calculations based on the Finite Element Method (FEM) of optical structures. To be able to understand which effects in the results that arises from limitations in the model, we begin by verifying the application tool for the most basic surface structures and gradually increase the complexity of the structures.
Place, publisher, year, edition, pages
Weinheim, Germany: Wiley-VCH Verlagsgesellschaft, 2008. Vol. 205, no 4, 945-948 p.
07.05.Tp; 07.60.Fs; 78.20.Bh
IdentifiersURN: urn:nbn:se:liu:diva-42732DOI: 10.1002/pssa.200777895ISI: 000255702600052Local ID: 68444OAI: oai:DiVA.org:liu-42732DiVA: diva2:263589
4th International Conference on Spectroscopic Ellipsometry (ICSE 4), Stockholm, Sweden, 11–15 June 2007