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High Power Impulse Magnetron Sputtering; An Overview of History, Properties and Current Status
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
2008 (English)In: 7th Iberian VCacuum Meeting 5th European Topical Conference on Hard Coatings,2008, 2008Conference paper (Other academic)
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URN: urn:nbn:se:liu:diva-42815Local ID: 69024OAI: diva2:263672
Available from: 2009-10-10 Created: 2009-10-10

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Böhlmark, Johan
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The Institute of TechnologyPlasma and Coating Physics
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