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Cross-field Ion Transport in High Power Impulse Magnetron Sputtering and it's Effect on Deposition Rates
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
2008 (English)In: HIPIMS Days,2008, 2008Conference paper (Other academic)
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URN: urn:nbn:se:liu:diva-42817Local ID: 69026OAI: diva2:263674
Available from: 2009-10-10 Created: 2009-10-10

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Lundin, Daniel
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The Institute of TechnologyPlasma and Coating Physics
Natural Sciences

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