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Cross-field ion Transport in High Power impulse Magnetron Sputtering and its Effect on Deposition Rates
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
2008 (English)In: The 11:th International Conference on Plasma Surface Engineering,2008, 2008Conference paper (Other academic)
Abstract [en]


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URN: urn:nbn:se:liu:diva-43323Local ID: 73520OAI: diva2:264182
Available from: 2009-10-10 Created: 2009-10-10

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Lundin, Daniel
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The Institute of TechnologyDepartment of Physics, Chemistry and Biology
Natural Sciences

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