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High Power Impulse Magnetron Sputtering - HiPIMS
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .ORCID iD: 0000-0002-1744-7322
2008 (English)In: The 11:th International Conference on Plasma Surface Engineering,2008, 2008Conference paper (Other academic)
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URN: urn:nbn:se:liu:diva-43326Local ID: 73523OAI: diva2:264185
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2013-10-30

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Helmersson, Ulf
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The Institute of TechnologyPlasma and Coating Physics
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