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Effect on Thin Film Growth due to Anomalous Transport in High Power Impulse Magnetron Sputtering
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
2008 (English)In: AVS 55:th International Symposium,2008, 2008Conference paper, Published paper (Other academic)
Abstract [en]

  

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2008.
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Natural Sciences
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URN: urn:nbn:se:liu:diva-43328Local ID: 73526OAI: oai:DiVA.org:liu-43328DiVA: diva2:264187
Available from: 2009-10-10 Created: 2009-10-10

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Lundin, Daniel

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The Institute of TechnologyPlasma and Coating Physics
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CiteExportLink to record
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  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
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