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Effect on Thin Film Growth due to Anomalous Transport in High Power Impulse Magnetron Sputtering
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .ORCID iD: 0000-0001-8591-1003
2008 (English)In: AVS 55:th International Symposium,2008, 2008Conference paper, Published paper (Other academic)
Abstract [en]

  
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2008.
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Natural Sciences
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URN: urn:nbn:se:liu:diva-43328Local ID: 73526OAI: oai:DiVA.org:liu-43328DiVA, id: diva2:264187
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2020-11-16

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Lundin, Daniel

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