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Deposition of Metal Oxide Coatings using Reactive High Power Impulse Magnetron Sputtering
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .
2008 (English)In: AVS 55th International Symposium,2008, 2008Conference paper, Published paper (Other academic)
Abstract [en]

  

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2008.
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Natural Sciences
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URN: urn:nbn:se:liu:diva-43329Local ID: 73527OAI: oai:DiVA.org:liu-43329DiVA: diva2:264188
Available from: 2009-10-10 Created: 2009-10-10

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Wallin, Erik

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The Institute of TechnologyPlasma and Coating Physics
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CiteExportLink to record
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  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
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