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Carbon-vacancy related defects in 4H- and 6H-SiC
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Functional Electronic Materials.ORCID iD: 0000-0002-6405-9509
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
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1999 (English)In: Materials Science and Engineering B, Vol. 61-62, Elsevier , 1999, 202- p.Conference paper, Published paper (Refereed)
Abstract [en]

 Electron paramagnetic resonance (EPR) was used to study intrinsic defects in 4H- and 6H-SiC irradiated with 2.5 MeV electrons with doses ranging from 1×1017 to 2×1018 cm−2. In p-type 4H- and 6H-SiC, the dominant EPR signal, labeled EI1, associates with a defect centre having a low symmetry and an effective electron spin S=1/2. For both polytypes, its g-tensor was determined as gz=2.0015, gx=1.9962 and gy=2.0019, where gz and gx lie in the (11Image 0) plane and the z-axis makes an angle not, vert, similar41 degrees with the c-axis. Hyperfine interaction with a 29Si atom located at two equivalent sites in the nearest neighbour shell was detected, confirming that the defect resides at the carbon site. In heavily irradiated 4H- and 6H-SiC, a new EPR spectrum having an electron spin S=1, labeled EI3, was observed. In both polytypes, the EI3 centre has a low symmetry, an isotropic g-value of 2.0063 and a fine structure parameter |D|not, vert, similar5.5×10−2 cm−1. The observed hyperfine interaction with four 29Si atoms in the nearest neighbour shell confirms the involvement of the carbon vacancy in the defect. The defect is suggested to be a complex centre involving a carbon vacancy.

Place, publisher, year, edition, pages
Elsevier , 1999. 202- p.
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Natural Sciences
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URN: urn:nbn:se:liu:diva-45155DOI: 10.1016/S0921-51079800502-9Local ID: 79840OAI: oai:DiVA.org:liu-45155DiVA: diva2:266017
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ECSCRM'98
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2013-10-02

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Nguyen, Son TienChen, WeiminMonemar, BoJanzén, Erik

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