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Photo-EPR Studies on Low-Energy Electron-irradiated 4H-SiC
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.ORCID iD: 0000-0002-7171-5383
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2009 (English)In: Materials Science Forum, Vols. 615-617, Materials Science Forum Vols. 615-617: Trans Tech Publications , 2009, 401-404 p.Conference paper, Published paper (Refereed)
Abstract [en]

Photoexcitation electron paramagnetic resonance (photo-EPR) was used to determine deep levels related to the carbon vacancy (VC) in 4H-SiC. High-purity free-standing n-type 4H-SiC epilayers with concentration of intrinsic defects (except the photo-insensitive SI1 center) below the detection limit of EPR were irradiated with low-energy (200 keV) electrons to create mainly VC and defects related to the C sublattice. The simultaneous observation of and signals, their relative intensity changes and the absence of other defects in the sample provide a more straight and reliable interpretation of the photo-EPR results. The study suggests that the (+|0) level of VC is located at ~EC–1.77 eV in agreement with previously reported results and its single and double acceptor levels may be at ~ EC–0.8 eV and ~ EC–1.0 eV, respectively.

Place, publisher, year, edition, pages
Materials Science Forum Vols. 615-617: Trans Tech Publications , 2009. 401-404 p.
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Natural Sciences
Identifiers
URN: urn:nbn:se:liu:diva-45289DOI: 10.4028/www.scientific.net/MSF.615-617.401Local ID: 80731ISBN: 978-087849334-0 (print)OAI: oai:DiVA.org:liu-45289DiVA: diva2:266151
Conference
7th European Conference on Silicon Carbide and Related Materials, ECSCRM 2008; Barcelona; Spain
Available from: 2009-10-10 Created: 2009-10-10 Last updated: 2015-03-11

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Carlsson, PatrickNguyen, Son TienPedersen, HenrikJanzén, Erik

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