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Charge state and time resolved plasma composition of a pulsed zirconium arc in a nitrogen environment
Materials Chemistry, RWTH-Aachen.
Lawrence Berkeley National Laboratory, California.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.ORCID iD: 0000-0002-2837-3656
Materials Chemistry, RWTH-Aachen.
2004 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 96, no 9, 4793-4799 p.Article in journal (Refereed) Published
Abstract [en]

The species and ion charge state evolution of a pulsed cathodic arc plasma was investigated at different pressures. A zirconium cathode was operated in a nitrogen environment, and the plasma composition was analyzed by time-of-flight charge-to-mass spectrometry. Large plasma chemistry changes were detected with respect to time and pressure, The 250 µs plasma pulse can be divided in two characteristic phases: a transient phase before 150 µs and a steady state phase for all later times. The measured changes in plasma chemistry in the transient phase at p~10-5 Torr are explained by charge transfer collisions, while the increasing N+ fraction in the p > 10 -5 Torr range most likely originates from erosion of the nitrided cathode surface. In the steady-state phase, a pressure-induced change from higher to lower charge states was observed, which was mainly due to scattering of self-sputtered metal followed by metal ion-atom charge exchange collisions. These results are of importance for understanding the evolution of thin film composition and microstructure during reactive plasma deposition. © 2004 American Institute of Physics.

Place, publisher, year, edition, pages
2004. Vol. 96, no 9, 4793-4799 p.
National Category
Engineering and Technology
URN: urn:nbn:se:liu:diva-45588DOI: 10.1063/1.1803627OAI: diva2:266484
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2016-08-31

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