liu.seSearch for publications in DiVA
Change search
ReferencesLink to record
Permanent link

Direct link
Charge state and time resolved plasma composition of a pulsed zirconium arc in a nitrogen environment
Materials Chemistry, RWTH-Aachen.
Lawrence Berkeley National Laboratory, California.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.
Materials Chemistry, RWTH-Aachen.
2004 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 96, no 9, 4793-4799 p.Article in journal (Refereed) Published
Abstract [en]

The species and ion charge state evolution of a pulsed cathodic arc plasma was investigated at different pressures. A zirconium cathode was operated in a nitrogen environment, and the plasma composition was analyzed by time-of-flight charge-to-mass spectrometry. Large plasma chemistry changes were detected with respect to time and pressure, The 250 µs plasma pulse can be divided in two characteristic phases: a transient phase before 150 µs and a steady state phase for all later times. The measured changes in plasma chemistry in the transient phase at p~10-5 Torr are explained by charge transfer collisions, while the increasing N+ fraction in the p > 10 -5 Torr range most likely originates from erosion of the nitrided cathode surface. In the steady-state phase, a pressure-induced change from higher to lower charge states was observed, which was mainly due to scattering of self-sputtered metal followed by metal ion-atom charge exchange collisions. These results are of importance for understanding the evolution of thin film composition and microstructure during reactive plasma deposition. © 2004 American Institute of Physics.

Place, publisher, year, edition, pages
2004. Vol. 96, no 9, 4793-4799 p.
National Category
Engineering and Technology
URN: urn:nbn:se:liu:diva-45588DOI: 10.1063/1.1803627OAI: diva2:266484
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2012-01-24

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Rosén, JohannaHultman, Lars
By organisation
The Institute of TechnologyThin Film Physics
In the same journal
Journal of Applied Physics
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 24 hits
ReferencesLink to record
Permanent link

Direct link