Sub ppm detection of hydrogen
2008 (English)In: IEEE Sensors Journal, ISSN 1530-437X, Vol. 8, no 03-Apr, 301-307 p.Article in journal (Refereed) Published
A light pulse technique and a field-effect device were used to detect small concentration steps of hydrogen in air. The detection limit was lower than 40 ppb, which is at least one order of magnitude lower than previously reported measurements (with field-effect devices) of hydrogen concentration in air. The device structure was a metal-insulator-semiconductor capacitor with a metal double layer with 17.5 nm Pd (upper layer) and 7.5 nm Pt on a SiO2 insulator and a Si substrate.
Place, publisher, year, edition, pages
2008. Vol. 8, no 03-Apr, 301-307 p.
detection limit, gas detectors, hydrogen, metal-insulator-semiconductor (MIS) devices
National CategoryEngineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-45867DOI: 10.1109/JSEN.2008.917471OAI: oai:DiVA.org:liu-45867DiVA: diva2:266763