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UV-SLPT for gas sensor research on MISiC devices
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Physics .
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Physics .ORCID iD: 0000-0002-0873-2877
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Physics .
2007 (English)In: IEEE Sensors Journal, ISSN 1530-437X, E-ISSN 1558-1748, Vol. 7, no 03-Apr, 592-599 p.Article in journal (Refereed) Published
Abstract [en]

A modified Scanning Light Pulse Technique (SLPT) setup that can be used to evaluate SiC-based gas-sensitive field-effect devices is introduced. This is exemplified with measurements on a Pt-MISiC capacitor that has a metal thickness gradient. The device shows large responses to hydrogen and ammonia in air. The H-2 and NH3 responses show a complementary dependence on the Pt film thickness at 140 degrees C. The temperature dependence differs however for the two gases. The measurement setup uses UV transparent optics together with mechanical chopping of light from a short wavelength light source. The spatial resolution of the system is found to be approximately 50 mu m.

Place, publisher, year, edition, pages
2007. Vol. 7, no 03-Apr, 592-599 p.
Keyword [en]
ammonia, gas sensors, hydrogen, MISiC, platinum, Pt, scanning light pulse technique, silicon carbide, SLPT, UV-SLPT, wide band gap semiconductor
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-45962DOI: 10.1109/JSEN.2007.891954OAI: oai:DiVA.org:liu-45962DiVA: diva2:266858
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-13

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Klingvall, RogerEriksson, MatsLundström, Ingemar

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