liu.seSearch for publications in DiVA
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Generalized infrared ellipsometry study of thin epitaxial AlN layers with complex strain behavior
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Fak. für Phys./Geowiss., Iniversität Leipzig, 04103 Leipzig, Germany.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.
Show others and affiliations
2003 (English)Conference paper, Published paper (Refereed)
Abstract [en]

The effect of film thickness on the strain and structural properties of thin epitaxial AlN films has been investigated, and a sub-layer model of the degree of strain and related defects for all films is suggested. The vibrational properties of the films have been studied by generalized infrared spectroscopic ellipsometry. The proposed sub-layer model has been successfully applied to the analysis of the ellipsometry data trough model calculations of the infrared dielectric function. © 2003 Elsevier B.V. All rights reserved.

Place, publisher, year, edition, pages
2003. Vol. 340-342, 416-420 p.
Series
PHYSICA B-CONDENSED MATTER, ISSN 0921-4526 ; 340
Keyword [en]
AlN, Infrared ellipsometry, Phonons, Strain
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-46349DOI: 10.1016/j.physb.2003.09.059OAI: oai:DiVA.org:liu-46349DiVA: diva2:267245
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2011-09-19

Open Access in DiVA

No full text

Other links

Publisher's full text

Authority records BETA

Darakchieva, VanyaBirch, JensTungasmita, SukkanestePaskova, TanjaMonemar, Bo

Search in DiVA

By author/editor
Darakchieva, VanyaBirch, JensTungasmita, SukkanestePaskova, TanjaMonemar, Bo
By organisation
The Institute of TechnologySemiconductor MaterialsThin Film PhysicsDepartment of Physics, Chemistry and Biology
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 164 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf