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Structural, electrical, and optical properties of diamondlike carbon films deposited by dc magnetron sputtering
College of William and Mary, Williamsburg, Virginia .
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, The Institute of Technology.
University of Illinois, Urbana.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.ORCID iD: 0000-0002-2837-3656
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2003 (English)Other (Other academic)
Abstract [en]

The electrical and optical properties of diamondlike carbon films deposited by direct current magnetron sputtering on Si substrates at room temperature have been measured as a function of the ion energy (Eion) and ion-to-carbon flux (Jion/JC). The results show that, in the ranges of 5 eV⩽Eion⩽85 eV and 1.1⩽Jion/JC⩽6.8, the presence of defective graphite formed by subplanted C and Ar atoms, voids, and the surface roughness, are the dominant influences on the resistivity and optical absorption

Place, publisher, year, pages
American Vacuum Society , 2003. Vol. 21, no 6
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Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-46454DOI: 10.1116/1.1617277OAI: oai:DiVA.org:liu-46454DiVA: diva2:267350
Note
LettersAvailable from: 2009-10-11 Created: 2009-10-11 Last updated: 2016-08-31

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Hultman, Lars

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