Distinctive photocurrent chemical images on bare SiO2 between continuous metal gates
2003 (English)In: Sensors and actuators. B, Chemical, ISSN 0925-4005, Vol. 95, no 1-3, 116-122 p.Conference paper (Other academic)
Distinctive two-dimensional chemical images of hydrogen, ammonia and nitrogen dioxide have been obtained using a scanning light pulse technique (SLPT) on a metal-oxide-semiconductor (MOS) device. The sensor consists of an MOS capacitor with two continuous metal gates of Pd (40nm) and Au (50nm) arranged in a concurrent geometry, leaving a bare silicon dioxide region in between the biased gates. The present arrangement provides a new robust alternative to the existing strategies used to induce spatially distributed chemical responses, required for SLPT and allows to measure the response in a different place than where the biasing electrodes operate. Accordingly, the splitting of biasing and detection coordinates enables to optimize electrical and chemical functions separately providing a higher versatility in the choice of functional sensing materials or stable biasing electrodes. © 2003 Elsevier B.V. All rights reserved.
Place, publisher, year, edition, pages
2003. Vol. 95, no 1-3, 116-122 p.
Chemical images, Field-effect devices, Gas sensors, Scanning light pulse technique
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-46459DOI: 10.1016/S0925-4005(03)00419-2OAI: oai:DiVA.org:liu-46459DiVA: diva2:267355