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Temporal development of the composition of Zr and Cr cathodic arc plasma streams in a N2 environment
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.
Lawrence Berkeley Natl. Laboratory, Berkeley, CA 94720, United States.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.ORCID iD: 0000-0002-2837-3656
Materials Chemistry, RWTH-Aachen, D-52056 Aachen, Germany.
2003 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 94, no 3, p. 1414-1419Article in journal (Refereed) Published
Abstract [en]

The development of the plasma composition in a pulsed plasma stream generated by cathodic arc was described. The time-resolved plasma composition for the cathode materials was analyzed by using time-of-flight charge-to-mass spectrometry. The results showed that the average charge state was affected by the reactive gas pressure and also by the time after ignition.
Place, publisher, year, edition, pages
2003. Vol. 94, no 3, p. 1414-1419
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Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-46535DOI: 10.1063/1.1591079OAI: oai:DiVA.org:liu-46535DiVA, id: diva2:267431
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-13

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Rosén, JohannaHultman, Lars

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