Role of carbon in boron suboxide thin films
2003 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 21, no 4, 1355-1358 p.Article in journal (Refereed) Published
X-ray amorphous BO0.02 thin films with the C content from 0 to 0.6 at. % were grown by reactive dual magnetron sputtering in an UHV system. It was shown that the elastic and dielectric properties of the as-deposited films are affected by the amount of the incorporated C and the film density.
Place, publisher, year, edition, pages
2003. Vol. 21, no 4, 1355-1358 p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-46557DOI: 10.1116/1.1560715OAI: oai:DiVA.org:liu-46557DiVA: diva2:267453