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Role of carbon in boron suboxide thin films
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics. Linköping University, The Institute of Technology.
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2003 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 21, no 4, 1355-1358 p.Article in journal (Refereed) Published
Abstract [en]

X-ray amorphous BO0.02 thin films with the C content from 0 to 0.6 at. % were grown by reactive dual magnetron sputtering in an UHV system. It was shown that the elastic and dielectric properties of the as-deposited films are affected by the amount of the incorporated C and the film density.

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2003. Vol. 21, no 4, 1355-1358 p.
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Engineering and Technology
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URN: urn:nbn:se:liu:diva-46557DOI: 10.1116/1.1560715OAI: oai:DiVA.org:liu-46557DiVA: diva2:267453
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-13

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Music, DenisKugler, Veronika MozhdehCzigany, ZoltFlink, AxelHultman, LarsHelmersson, Ulf

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Music, DenisKugler, Veronika MozhdehCzigany, ZoltFlink, AxelHultman, LarsHelmersson, Ulf
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Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
Engineering and Technology

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