Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering
2003 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, Vol. 21, no 4, 851-859 p.Article in journal (Refereed) Published
A systematic study of physical properties of sputter-deposited DLC films was performed as a function of flux ratio and ion energy. The energy and flux ions and neutral atoms impinging on the surface of the growing films were deduced from Langmuir probe measurements and theoretical calculations. The bombardment of growing films by the energetic particles led to changes in microstructure and mechanical properties. Results suggest that the presence of defective graphite formed by subplanted C and Ar atoms is the dominant influence on the mechanical properties of the DLC films.
Place, publisher, year, edition, pages
2003. Vol. 21, no 4, 851-859 p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-46576DOI: 10.1116/1.1575231OAI: oai:DiVA.org:liu-46576DiVA: diva2:267472