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Gas sensing based on ellipsometric measurement on porous silicon
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Optics .ORCID iD: 0000-0001-9229-2028
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
2003 (English)In: Physica status solidi. A, Applied research, ISSN 0031-8965, E-ISSN 1521-396X, Vol. 197, no 2, 518-522 p.Conference paper, Published paper (Other academic)
Abstract [en]

Ellipsometry has sufficient sensitivity for sensor applications and is here used as an optical readout method in a gas sensing system. Porous silicon is used as sensing layers in which vapors of solvents can adsorb and condensate due to capillary effects. A miniaturized multi-beam ellipsometer system is proposed and the concept is demonstrated by measurements on alcohol vapors. Optimization of the sensor system is discussed and improvement of sensitivity and alteration of selectivity by metal deposition in porous silicon layers are presented.

Place, publisher, year, edition, pages
2003. Vol. 197, no 2, 518-522 p.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-46648DOI: 10.1002/pssa.200306556OAI: oai:DiVA.org:liu-46648DiVA: diva2:267544
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-13

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Arwin, HansWang, GuoliangJansson, Roger

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