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Growth of fullerene-like carbon nitride thin solid films by reactive magnetron sputtering, Role of low-energy ion irradiation in determining microstructure and mechanical properties
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.ORCID iD: 0000-0002-2837-3656
2003 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 93, no 5, 3002-3015 p.Article in journal (Refereed) Published
Abstract [en]

Growth of fullerene-like (FL) carbon nitride thin solid films by reactive magnetron sputtering was discussed. The microstructure of FL CNx was found to be sensitive to the deposition conditions. The results showed that the resulting FL structures had characteristic mechanical properties and an increase in the curvature of the FL lattice planes leads to a reduced long-range order.

Place, publisher, year, edition, pages
2003. Vol. 93, no 5, 3002-3015 p.
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Engineering and Technology
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URN: urn:nbn:se:liu:diva-46715DOI: 10.1063/1.1538316OAI: oai:DiVA.org:liu-46715DiVA: diva2:267611
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-13

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Neidhardt, JörgHultman, Lars

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