Growth of fullerene-like carbon nitride thin solid films by reactive magnetron sputtering, Role of low-energy ion irradiation in determining microstructure and mechanical properties
2003 (English)In: Journal of Applied Physics, ISSN 0021-8979, Vol. 93, no 5, 3002-3015 p.Article in journal (Refereed) Published
Growth of fullerene-like (FL) carbon nitride thin solid films by reactive magnetron sputtering was discussed. The microstructure of FL CNx was found to be sensitive to the deposition conditions. The results showed that the resulting FL structures had characteristic mechanical properties and an increase in the curvature of the FL lattice planes leads to a reduced long-range order.
Place, publisher, year, edition, pages
2003. Vol. 93, no 5, 3002-3015 p.
National CategoryEngineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-46715DOI: 10.1063/1.1538316OAI: oai:DiVA.org:liu-46715DiVA: diva2:267611