Elastic modulus of amorphous boron suboxide thin films studied by theoretical and experimental methods
2003 (English)In: Journal of Applied Physics, ISSN 0021-8979, Vol. 93, no 2, 940-944 p.Article in journal (Refereed) Published
Elastic modulus of amorphous boron suboxide thin films was studied by theoretical and experimental methods. It was shown that the increase of x in the a-BOx films from 0.08 to 0.18 decreased the magnitude of the elastic modulus from 273 to 231 GPa. The decrease of the elastic modulus with an increasing amount of O was correlated to the presence of the long B-O bonds with ionic contribution and the reduction of the film density.
Place, publisher, year, edition, pages
2003. Vol. 93, no 2, 940-944 p.
National CategoryEngineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-46749DOI: 10.1063/1.1531811OAI: oai:DiVA.org:liu-46749DiVA: diva2:267645