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Influence of high-energy Si+ ion irradiation on microstructure and mechanical properties of alumina films
National Institute of Advanced Industrial Science and Technology (AIST), 2266-98 Anagahora, Moriyama, Nagoya 463-8560, Japan.
National Institute of Advanced Industrial Science and Technology (AIST), 2266-98 Anagahora, Moriyama, Nagoya 463-8560, Japan.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .ORCID iD: 0000-0002-1744-7322
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2002 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 158-159, 534-537 p.Article in journal (Refereed) Published
Abstract [en]

Amorphous alumina films, approximately 600 nm in thickness, prepared on Si(100) substrates by RF magnetron sputtering were irradiated with 2.0 MeV Si ions at a dose of 1 × 1017 ions/cm2 and the influence on the composition, microstructure, and mechanical properties was examined by Rutherford backscattering. X-ray diffraction and nano-indentation measurements. It was found that the O/Al ratio in the films was approximately 1.5, and there was no significant alteration in this ratio after ion irradiation. However, a structural change from amorphous to the crystalline ?-alumina was observed. Hardness and elastic modulus of the irradiated film were significantly increased from approximately 11 and 181 GPa up to approximately 25 and 246 GPa, respectively. © 2002 Elsevier Science B.V. All rights reserved.

Place, publisher, year, edition, pages
2002. Vol. 158-159, 534-537 p.
Keyword [en]
Amorphous alumina, Gamma-alumina, Ion beam-induced crystallization, Nano-indentation measurement, Rutherford backscattering spectrometry, X-ray diffraction
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-46884DOI: 10.1016/S0257-8972(02)00300-6OAI: oai:DiVA.org:liu-46884DiVA: diva2:267780
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-13

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Music, DenisHelmersson, Ulf

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