Optical properties of anatase TiO2 thin films prepared by aqueous sol-gel process at low temperature
2002 (English)In: Thin Solid Films, ISSN 0040-6090, Vol. 405, 50-54 p.Article in journal (Refereed) Published
TiO2 thin films were spin-coated on Si (100) substrates via an aqueous sol-gel route using Ti(OBun)4 and H2O2 as starting materials, and were annealed in air at different temperatures up to 550 °C for 1 h. X-Ray diffractometry indicates that crystallization into anatase started at 350 °C. The 350 °C-annealed films were further characterized by Auger electron spectroscopy, X-ray photoelectron spectroscopy, and variable angle spectroscopic ellipsometry. The results show that homogeneous, carbon-free TiO2 films with high refractive index (n=2.3 at 550 nm) were successfully obtained under an annealing temperature as low as 350 °C. The indirect and direct optical absorption bandgaps of the anatase film are estimated as 3.23 and 3.80 eV, respectively. © 2002 Elsevier Science B.V. All rights reserved.
Place, publisher, year, edition, pages
2002. Vol. 405, 50-54 p.
Ellipsometry, Optical properties, Sol-gel, Titanium oxide
National CategoryEngineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-46973DOI: 10.1016/S0040-6090(01)01767-9OAI: oai:DiVA.org:liu-46973DiVA: diva2:267869