Properties of combined TiN and Pt thin films applied to gas sensing
2002 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, Vol. 20, no 3, 667-673 p.Article in journal (Refereed) Published
The effect of Pt in the proximity of TiN with respect to the oxidation behavior was addressed. TiN was grown at two different temperatures that are known to produce films with varying porosity. Pt was used as the catalytic metal and either deposited on top of the TiN film grown at 400°C or co-sputtered in a reactive atmosphere of Ar and N2 at the two different deposition temperatures. The films were characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), atomic force microscopy (AFM), x-ray diffraction, Auger electron spectroscopy (AES), and x-ray photoemission spectroscopy (XPS), and the gas response of the sensor to hydrogen, ammonia, propene, and acetaldehyde was measured. Aging studies were also carried out for a period of one month. Overall, significant results were obtained.
Place, publisher, year, edition, pages
2002. Vol. 20, no 3, 667-673 p.
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-47025DOI: 10.1116/1.1460889OAI: oai:DiVA.org:liu-47025DiVA: diva2:267921