Synthesis and mechanical properties of boron suboxide thin films
2002 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, Vol. 20, no 2, 335-337 p.Article in journal (Refereed) Published
The synthesis and mechanical properties of boron suboxide thin films deposited on silicon and graphite substrates was discussed. The deposition was performed using reactive magnetron sputtering technique, and amorphous films were obtained. The affect of varying O2 partial pressure on film composition and microstructure was studied using spectroscopic techniques. It was found that variation of partial pressure from 0.02 to 0.21 resulted in a decrease in elastic modulus from 272 to 109 GPa.
Place, publisher, year, edition, pages
2002. Vol. 20, no 2, 335-337 p.
National CategoryEngineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-47075DOI: 10.1116/1.1434967OAI: oai:DiVA.org:liu-47075DiVA: diva2:267971