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Synthesis and mechanical properties of boron suboxide thin films
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
National Industrial Research Institute of Nagoya, Nagoya 462-8510, Japan.
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2002 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 20, no 2, 335-337 p.Article in journal (Refereed) Published
Abstract [en]

The synthesis and mechanical properties of boron suboxide thin films deposited on silicon and graphite substrates was discussed. The deposition was performed using reactive magnetron sputtering technique, and amorphous films were obtained. The affect of varying O2 partial pressure on film composition and microstructure was studied using spectroscopic techniques. It was found that variation of partial pressure from 0.02 to 0.21 resulted in a decrease in elastic modulus from 272 to 109 GPa.

Place, publisher, year, edition, pages
2002. Vol. 20, no 2, 335-337 p.
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Engineering and Technology
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URN: urn:nbn:se:liu:diva-47075DOI: 10.1116/1.1434967OAI: oai:DiVA.org:liu-47075DiVA: diva2:267971
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-13

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Music, DenisSchneider, JochenKugler, Veronika MozhdehÖstblom, MattiasHultman, LarsHelmersson, Ulf

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Music, DenisSchneider, JochenKugler, Veronika MozhdehÖstblom, MattiasHultman, LarsHelmersson, Ulf
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The Institute of TechnologyThin Film PhysicsDepartment of Physics, Chemistry and BiologySensor Science and Molecular Physics Plasma and Coating Physics
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Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
Engineering and Technology

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