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Nitrogen bonding structure in carbon nitride thin films studied by soft x-ray spectroscopy
Department of Physics, Uppsala University, Box 530, SE-75121 Uppsala, Sweden.
Såthe, C., Department of Physics, Uppsala University, Box 530, SE-75121 Uppsala, Sweden.
Department of Physics, Uppsala University, Box 530, SE-75121 Uppsala, Sweden.
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2001 (English)In: Applied Physics Letters, ISSN 0003-6951, Vol. 79, no 26, 4348-4350 p.Article in journal (Refereed) Published
Abstract [en]

Soft x-ray absorption (SXAS) and emission (SXES) spectroscopies were applied to study the nitrogen bonding structure in magnetron sputtered CNx thin films. By comparing with calculated spectra of N in different model systems, N in three main bonding environments can be identified: (i) CN bonds, with a sharp SXAS peak at 399.5 eV, (ii) pyridine-like N (i.e., N bonded to two C atoms), with an x-ray absorption resonance at ~398.5 eV, and (iii) N substituted in graphite, possibly with one sp3 carbon as a neighbor (SXAS energy ~401 eV). These bondings are present in all CNx films analyzed, however, as shown earlier, the relative intensities between the peaks may vary with the growth conditions. Differences in the coordination of the nearest or second nearest C neighbors only cause slight changes in the peak positions and spectrum shape. © 2001 American Institute of Physics.

Place, publisher, year, edition, pages
2001. Vol. 79, no 26, 4348-4350 p.
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Natural Sciences
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URN: urn:nbn:se:liu:diva-47153DOI: 10.1063/1.1428108OAI: oai:DiVA.org:liu-47153DiVA: diva2:268049
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2011-01-13

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