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Resonant scattering in delta-doped heterostructures
Department of Physics, University of Illinois, Urbana, IL 61801, United States.
Department of Physics, Chalmers University of Technology, SE-412 96 Gothenburg, Sweden.
Institute of Physics, Jagellonian University, ul. Reymonta 4, PL-30-059 Krakow, Poland.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Surface and Semiconductor Physics .
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2001 (English)In: Applied Physics Letters, ISSN 0003-6951, Vol. 79, no 18, 2913-2915 p.Article in journal (Refereed) Published
Abstract [en]

We demonstrate the utility of resonant x-ray scattering in probing the structure of doping layers at a heterostructure interface. The positions of germanium layers inserted at the interface of a silicon epitaxial film assert a strong influence of the phase of the scattered intensity along the crystal truncation rods. The phase of the scattering, and hence the internal structure of the layers, can be determined conveniently by analyzing its energy dependence in the vicinity of the Germanium absorption edge at 11.103 keV. © 2001 American Institute of Physics.

Place, publisher, year, edition, pages
2001. Vol. 79, no 18, 2913-2915 p.
National Category
Engineering and Technology
URN: urn:nbn:se:liu:diva-47238DOI: 10.1063/1.1415352OAI: diva2:268134
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2011-01-13

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