MBE-based SiGe/Si heterojunction multilayer structures
2001 (English)In: Journal of Crystal Growth, ISSN 0022-0248, Vol. 227-228, 744-748 p.Conference paper (Other academic)
In this paper, SiGe/Si multilayer heterostructures prepared by molecular beam epitaxy (MBE) are described with the aim of manufacturing SiGe heterojunction bipolar transistors (HBTs). Based on the simulations made by Medici, device structures have been designed and grown. The quality of the MBE layered structures has been characterized by reflection high-energy electron diffraction, X-ray diffraction, secondary ion mass spectrometry and spreading resistance. Furthermore, SiGe-HBTs have been fabricated. Promising DC and RF results of processed HBT devices have been obtained. © 2001 Elsevier Science B.V.
Place, publisher, year, edition, pages
2001. Vol. 227-228, 744-748 p.
A1. Doping, A1. X-ray diffraction, A2. Single crystal growth, A3. Molecular beam epitaxy, B1. Germanium silicon alloys, B2. Semiconducting silicon, B3. Bipolar transistors, B3. Heterojunction semiconductor devices
National CategoryEngineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-47327DOI: 10.1016/S0022-0248(01)00819-3OAI: oai:DiVA.org:liu-47327DiVA: diva2:268223