Development of a ChemFET sensor with molecular films of porphyrins as sensitive layer
2001 (English)In: Sensors and actuators. B, Chemical, ISSN 0925-4005, Vol. 77, no 1-2, 567-571 p.Article in journal (Refereed) Published
The interaction of chemical species with molecular films of porphyrins causes variations of the work function of the film itself, as it has been recently demonstrated by using the Kelvin probe technique. This characteristic makes porphyrins films suitable to be used as sensitive layers in ChemFET sensors. In this paper, we present a preliminary report about the fabrication and testing of such gas sensitive devices. The technological solutions towards an optimised device are also illustrated and discussed. © 2001 Elsevier Science B.V.
Place, publisher, year, edition, pages
2001. Vol. 77, no 1-2, 567-571 p.
ChemFET sensor, Palladium gate, Porphyrins films
Engineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-47352DOI: 10.1016/S0925-4005(01)00691-8OAI: oai:DiVA.org:liu-47352DiVA: diva2:268248