liu.seSearch for publications in DiVA
Change search
ReferencesLink to record
Permanent link

Direct link
Anisotropies in magnetron sputtered carbon nitride thin films
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.ORCID iD: 0000-0002-2837-3656
Show others and affiliations
2001 (English)In: Applied Physics Letters, ISSN 0003-6951, Vol. 78, no 18, 2703-2705 p.Article in journal (Refereed) Published
Abstract [en]

Carbon nitride CNx (O=x=0.35) thin films, deposited by reactive dc magnetron sputtering in Ar/N2 discharges have been studied with respect to microstructure using electron microscopy, and elastic modulus using nanoindentation and surface acoustic wave analyses. For growth temperature of 100°C, the films were amorphous, and with an isotropic Young's modulus of ~170-200 GPa essentially unaffected by the nitrogen fraction. The films grown at elevated temperatures (350-550°C) show anisotropic mechanical properties due to a textured microstructure with standing basal planes, as observed from measuring the Young's modulus in different directions. The modulus measured in the plane of the film was ~60-80 GPa, while in the vertical direction the modulus increased considerably from ~25 to ~200 GPa as the nitrogen content was increased above ~15 at. %. © 2001 American Institute of Physics.

Place, publisher, year, edition, pages
2001. Vol. 78, no 18, 2703-2705 p.
National Category
Engineering and Technology
URN: urn:nbn:se:liu:diva-47403DOI: 10.1063/1.1369388OAI: diva2:268299
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2016-08-31

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Hultman, Lars
By organisation
The Institute of TechnologyThin Film Physics
In the same journal
Applied Physics Letters
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 33 hits
ReferencesLink to record
Permanent link

Direct link