liu.seSearch for publications in DiVA
Change search
ReferencesLink to record
Permanent link

Direct link
Surface damage formation during ion-beam thinning of samples for transmission electron microscopy
Fibics Incorporated, Suite 200, 556 Booth Street, Ottawa K1A 0G1, Canada.
National Research Council of Canada, Institute for Microstructural Sciences, M-50 Montreal Road, Ottawa K1A 0R6, Canada.
2001 (English)In: Ultramicroscopy, ISSN 0304-3991, Vol. 87, no 3, 97-104 p.Article in journal (Refereed) Published
Abstract [en]

All techniques employed in the preparation of samples for transmission electron microscopy (TEM) introduce or include artifacts that can degrade the images of the materials being studied. One significant cause of this image degradation is surface amorphization. The damaged top and bottom surface layers of TEM samples can obscure subtle detail, particularly at high magnification. Of the techniques typically used for TEM sample preparation of semiconducting materials, cleaving produces samples with the least surface amorphization, followed by low-angle ion milling, conventional ion milling, and focused ion beam (FIB) preparation. In this work, we present direct measurements of surface damage on silicon produced during TEM sample preparation utilizing these techniques. The thinnest damaged layer formed on a silicon surface was measured as 1.5nm thick, while an optimized FIB sample preparation process results in the formation of a 22nm thick damaged layer. Lattice images are obtainable from all samples. Copyright © 2001 Elsevier Science B.V.

Place, publisher, year, edition, pages
2001. Vol. 87, no 3, 97-104 p.
Keyword [en]
Cleaving, Focused ion beam, Ion milling, TEM sample preparation
National Category
Natural Sciences
URN: urn:nbn:se:liu:diva-47405DOI: 10.1016/S0304-3991(00)00096-6OAI: diva2:268301
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2011-01-13

Open Access in DiVA

No full text

Other links

Publisher's full text
In the same journal
Natural Sciences

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 18 hits
ReferencesLink to record
Permanent link

Direct link