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Single-crystal growth of NaCl-structure Al-Cr-N thin films on MgO(0 0 1) by magnetron sputter epitaxy
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Thin Film Physics.
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2007 (English)In: Scripta Materialia, ISSN 1359-6462, Vol. 57, no 12, 1089-1092 p.Article in journal (Refereed) Published
Abstract [en]

Single-crystal NaCl-structure Al0.68Cr0.32N thin films were deposited onto MgO(0 0 1) substrates. The films exhibit cube-on-cube epitaxial growth with an initial pseudomorphic strained layer before complete relaxation into an isotropic lattice parameter of 4.119 Å as shown by symmetric high-resolution X-ray diffraction and asymmetric reciprocal space maps. The relaxation proceeds via a threading dislocation network as revealed by transmission electron microscopy. Films of 900 nm thickness have a hardness of 32.4 ± 0.5 GPa, an elastic modulus of 460.8 ± 5 GPa, and a room-temperature resistivity of 2.7 × 103 O cm as determined by nanoindentation and four-point probe measurements, respectively. © 2007 Acta Materialia Inc.

Place, publisher, year, edition, pages
2007. Vol. 57, no 12, 1089-1092 p.
Keyword [en]
CrAlN, Nanoindentation, Single-crystal growth, Transmission electron microscopy, X-ray diffraction
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-47477DOI: 10.1016/j.scriptamat.2007.08.027OAI: oai:DiVA.org:liu-47477DiVA: diva2:268373
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2016-08-31

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Willmann, HerbertBeckers, ManfredGiuliani, FinnBirch, JensHultman, Lars

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