liu.seSearch for publications in DiVA
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Crystal quality evaluation by electrochemical preferential etching of p-type SiC crystals
Found. for Res. and Technol.-Hellas, Heraklion, Crete 71110, Greece.
Found. for Res. and Technol.-Hellas, Heraklion, Crete 71110, Greece.
Found. for Res. and Technol.-Hellas, Heraklion, Crete 71110, Greece.
Found. for Res. and Technol.-Hellas, Heraklion, Crete 71110, Greece.
Show others and affiliations
2000 (English)In: Journal of the Electrochemical Society, ISSN 0013-4651, E-ISSN 1945-7111, Vol. 147, no 7, 2744-2748 p.Article in journal (Refereed) Published
Abstract [en]

An electrochemical etching process is used for evaluating the types and the distribution of crystal defects on both the Si and C faces of p-type 6H and 4H-SiC. The surface morphology of the etched area is different for the two surface polarities. Dislocation-related etch-pits appeared on the etched surfaces due to a preferential etching process. The etching experiments were conducted in a commercial apparatus in combination with accurate capacitance-voltage profiling, showing that this characterization method is highly useful and simple for evaluating SiC material quality.

Place, publisher, year, edition, pages
2000. Vol. 147, no 7, 2744-2748 p.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-47628DOI: 10.1149/1.1393599OAI: oai:DiVA.org:liu-47628DiVA: diva2:268524
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-13

Open Access in DiVA

No full text

Other links

Publisher's full text

Authority records BETA

Yakimova, Rositsa

Search in DiVA

By author/editor
Yakimova, Rositsa
By organisation
The Institute of TechnologyMaterials Science
In the same journal
Journal of the Electrochemical Society
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 58 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf