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Growth of SrTiO3 thin films on LaAlO3(001) substrates, the influence of growth temperature on composition, orientation, and surface morphology
Acreo AB, Bredgatan 34, SE-602 21 Norrköping, Sweden.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Plasma and Coating Physics .ORCID iD: 0000-0002-1744-7322
2000 (English)In: Thin Solid Films, ISSN 0040-6090, Vol. 360, no 1-2, 181-186 p.Article in journal (Refereed) Published
Abstract [en]

SrTiO3 films have been grown on LaAlO3(001) single crystal substrates using rf-sputtering. The substrates were held at temperatures ranging from 100 to 850°C. For growth temperatures as low as 350°C epitaxial growth is observed. Below 350°C the films are polycrystalline and three different orientations (100), (110), and (111) can be observed using X-ray diffraction. Atomic force microscopy shows that films deposited at temperatures below 350°C and above 650°C are smooth while the surfaces of the films made at intermediate temperatures are rough and faceted. As growth temperatures decrease below 250°C, the films show decreasing amount of Sr.

Place, publisher, year, edition, pages
2000. Vol. 360, no 1-2, 181-186 p.
National Category
Engineering and Technology
URN: urn:nbn:se:liu:diva-47703DOI: 10.1016/S0040-6090(99)01099-8OAI: diva2:268599
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2013-10-30

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Helmersson, Ulf
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The Institute of TechnologyPlasma and Coating Physics
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