Growth of SrTiO3 thin films on LaAlO3(001) substrates, the influence of growth temperature on composition, orientation, and surface morphology
2000 (English)In: Thin Solid Films, ISSN 0040-6090, Vol. 360, no 1-2, 181-186 p.Article in journal (Refereed) Published
SrTiO3 films have been grown on LaAlO3(001) single crystal substrates using rf-sputtering. The substrates were held at temperatures ranging from 100 to 850°C. For growth temperatures as low as 350°C epitaxial growth is observed. Below 350°C the films are polycrystalline and three different orientations (100), (110), and (111) can be observed using X-ray diffraction. Atomic force microscopy shows that films deposited at temperatures below 350°C and above 650°C are smooth while the surfaces of the films made at intermediate temperatures are rough and faceted. As growth temperatures decrease below 250°C, the films show decreasing amount of Sr.
Place, publisher, year, edition, pages
2000. Vol. 360, no 1-2, 181-186 p.
National CategoryEngineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-47703DOI: 10.1016/S0040-6090(99)01099-8OAI: oai:DiVA.org:liu-47703DiVA: diva2:268599