liu.seSearch for publications in DiVA
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Role of hydrogen for the elastic properties of alumina thin films
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
Show others and affiliations
2002 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 80, no 7, 1144-1146 p.Article in journal (Refereed) Published
Abstract [en]

We describe the role of the presence of hydrogen on the elastic properties of AlxOyHz (0.32less than or equal toxless than or equal to0.4, 0.54less than or equal toyless than or equal to0.6, 3x10(-4)less than or equal tozless than or equal to0.14) films. The films were deposited by reactive magnetron sputtering in an Ar/O-2/H2O discharge and were studied by Rutherford backscattering spectrometry, nuclear resonance analysis, selected area electron diffraction, as well as nanoindentation. As the hydrogen concentration is increased from 0.03% to 13.9% the measured elastic modulus value is reduced by approximately 53%. The measured elastic modulus is in excellent agreement with our electronic structure calculations. The large scattering in the reported values of the elastic properties of amorphous alumina thin films can readily be understood by hydrogen incorporation during synthesis. (C) 2002 American Institute of Physics.

Place, publisher, year, edition, pages
2002. Vol. 80, no 7, 1144-1146 p.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-47902DOI: 10.1063/1.1448389OAI: oai:DiVA.org:liu-47902DiVA: diva2:268798
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-13

Open Access in DiVA

No full text

Other links

Publisher's full text

Authority records BETA

Schneider, Jochen

Search in DiVA

By author/editor
Schneider, Jochen
By organisation
The Institute of TechnologyDepartment of Physics, Chemistry and Biology
In the same journal
Applied Physics Letters
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 28 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf