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Recombination enhanced defect annealing in 4H-SiC
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
2005 (English)In: Materials Science Forum, Vols. 483-485, 2005, Vol. 483, 369-372 p.Conference paper, Published paper (Refereed)
Abstract [en]

Recombination enhanced defect annealing of intrinsic defects in 4H-SiC, created by low energy electron irradiation, has been observed. A reduction the defect concentration at temperature lower than the normal annealing temperature of 400&DEG, C and 800&DEG, C is observed after either above bandgap laser excitation or forward biasing of a pin-diode. The presence of the defects has been studied both electrically and optically using capacitance transient spectroscopy and low temperature photoluminescence. Photoluminescence measurements show that several lines, normally detected after electron irradiation, have almost or entirely disappeared by recombination enhanced annealing at room temperature. From capacitance transient measurements, the annealing enhancement is found to be largest for the HS2 hole trap, while the EH1 and EH3 electron traps also anneal out by recombination enhanced reaction but at a lower rate.

Place, publisher, year, edition, pages
2005. Vol. 483, 369-372 p.
Keyword [en]
SiC, radiation damage, enhanced annealing
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-48224OAI: oai:DiVA.org:liu-48224DiVA: diva2:269120
Conference
ECSCRM2004
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2010-12-13

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Storasta, LiutaurasCarlsson, FredrikBergman, PederJanzén, Erik

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Storasta, LiutaurasCarlsson, FredrikBergman, PederJanzén, Erik
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The Institute of TechnologySemiconductor MaterialsDepartment of Physics, Chemistry and Biology
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