liu.seSearch for publications in DiVA
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
A 4H-SiC BJT with an epitaxially regrown extrinsic base layer
Show others and affiliations
2005 (English)In: Materials Science Forum, ISSN 0255-5476, E-ISSN 1662-9752, Vol. 483, p. 905-908Article in journal (Refereed) Published
Abstract [en]

4H-SiC BJTs were fabricated using epitaxial regrowth instead of ion implantation to form a highly doped extrinsic base layer necessary for a good base ohmic contact. A remaining p(+) regrowth spacer at the edge of the base-emitter junction is proposed to explain a low current gain of 6 for the BJTs. A breakdown voltage of 1000 V was obtained for devices with Al implanted JTE.

Place, publisher, year, edition, pages
2005. Vol. 483, p. 905-908
Keywords [en]
bipolar junction transistor, extrinsic base, epitaxial regrowth
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-48234OAI: oai:DiVA.org:liu-48234DiVA, id: diva2:269130
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-12

Open Access in DiVA

No full text in DiVA

Authority records

Hallin, Christer

Search in DiVA

By author/editor
Hallin, Christer
By organisation
The Institute of TechnologyDepartment of Physics, Chemistry and Biology
In the same journal
Materials Science Forum
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 74 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf