Electrostatic force-feedback force sensor incorporated in an ultrahigh vacuum force microscope
2000 (English)In: Review of Scientific Instruments, ISSN 0034-6748, Vol. 71, no 1, 133-136 p.Article in journal (Refereed) Published
A force sensor based on a fiber-optic interferometric displacement transducer incorporated in an ultrahigh vacuum atomic force microscope is described. The operation of the sensor is based on balancing the tip-sample interfacial force using an electrostatic actuator. The electrodes of the actuator are formed by the grounded W cantilever and the metallized end facet of the optical fiber used by the interferometer. Chemical reduction of Ag by a wet chemical method is used for metal coating of the fiber end. A special masking procedure is used to obtain a window hole in the metal coating at the position of the fiber core to allow for optical beam output. Using a window instead of a semitransparent metal film allows us to save the low-finesse characteristics of the interferometer which facilitates the calibration of cantilever displacement. The performance of the sensor is discussed and exemplified by experimental results from force-separation measurements on the W-Au system in ultrahigh vacuum. (C) 2000 American Institute of Physics. [S0034-6748(00)01401-5].
Place, publisher, year, edition, pages
2000. Vol. 71, no 1, 133-136 p.
National CategoryEngineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-48376OAI: oai:DiVA.org:liu-48376DiVA: diva2:269272