liu.seSearch for publications in DiVA
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Growth of high quality p-type 4H-SiC substrates by HTCVD
Show others and affiliations
2003 (English)In: Materials Science Forum, Vols. 433-436, 2003, Vol. 433-4, 21-24 p.Conference paper, Published paper (Refereed)
Abstract [en]

By using the HTCVD technique together with Al doping, highly p-type doped 2" diameter 4H-SiC off-axis substrates with micropipe densities below 10 cm(-2) were grown. The Al concentration in the substrates could be varied from low 10(15) cm(-3) to low 10(19) cm(-3). Bulk resistivities down to 0.5 Omega-cm were realized. There were no indications of micropipe formation from Al precipitates, on the contrary, micropipe closing was observed.

Place, publisher, year, edition, pages
2003. Vol. 433-4, 21-24 p.
Keyword [en]
Al doping, HTCVD, micropipes, SiC bulk growth
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-48527OAI: oai:DiVA.org:liu-48527DiVA: diva2:269423
Conference
ECSCRM2002
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2010-12-13

Open Access in DiVA

No full text

Authority records BETA

Magnusson, BjörnJanzén, Erik

Search in DiVA

By author/editor
Magnusson, BjörnJanzén, Erik
By organisation
The Institute of TechnologySemiconductor Materials
Engineering and Technology

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 78 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf