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Effect of high-energy Si+ ion irradiation on the crystallization behavior of amorphous strontium titanate films
Natl Inst Adv Ind Sci & Technol, Nagoya, Aichi 4638560, Japan Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden.
Linköping University, Department of Physics, Chemistry and Biology. Linköping University, The Institute of Technology.
Natl Inst Adv Ind Sci & Technol, Nagoya, Aichi 4638560, Japan Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden.
Natl Inst Adv Ind Sci & Technol, Nagoya, Aichi 4638560, Japan Linkoping Univ, Dept Phys, SE-58183 Linkoping, Sweden.
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2002 (English)In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN 0168-583X, E-ISSN 1872-9584, Vol. 191, 226-229 p.Article in journal (Refereed) Published
Abstract [en]

Amorphous strontium titanate (STO) films deposited on Si substrates by magnetron sputtering at room temperature were irradiated with 2 MeV Si ions at doses of 5 x 10(16)-1.5 x 10(17) Si+/cm(2) and post-annealed at 450 degreesC in vacuum. The compositional and structural changes of STO films after the ion irradiation were examined by Rutherford backscattering spectrometry, scanning electron microscopy and X-ray diffraction measurements. The Sr:Ti:O ratio of the as-deposited films was found to be approximately 0.8:1:3. Ion irradiation did not affect the amount of Sr and Ti significantly and the films remained amorphous. After annealing, however, the formation of STO crystals was observed and Sr and O were slightly lost from the films. As compared to the un-irradiated STO films, the ion-irradiated ones showed significantly enhanced crystallization behaviors upon vacuum annealing. (C) 2002 Elsevier Science B.V. All rights reserved.

Place, publisher, year, edition, pages
2002. Vol. 191, 226-229 p.
Keyword [en]
SrTiO3 crystals, ion irradiation, crystallization of amorphous film, post-annealing
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:liu:diva-48865OAI: oai:DiVA.org:liu-48865DiVA: diva2:269761
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-12

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Department of Physics, Chemistry and BiologyThe Institute of Technology
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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Natural Sciences

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