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Electrochemical characterization of p-type hexagonal SiC
Fdn Res & Technol Hellas, Microelect Res Grp, IESL, GR-71110 Iraklion, Greece INPG, ENSPG, UMR CNRS 5628, Mat & Genie Phys Lab, FR-38402 St Martin Dheres, France Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden.
Fdn Res & Technol Hellas, Microelect Res Grp, IESL, GR-71110 Iraklion, Greece INPG, ENSPG, UMR CNRS 5628, Mat & Genie Phys Lab, FR-38402 St Martin Dheres, France Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden.
Fdn Res & Technol Hellas, Microelect Res Grp, IESL, GR-71110 Iraklion, Greece INPG, ENSPG, UMR CNRS 5628, Mat & Genie Phys Lab, FR-38402 St Martin Dheres, France Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden.
Fdn Res & Technol Hellas, Microelect Res Grp, IESL, GR-71110 Iraklion, Greece INPG, ENSPG, UMR CNRS 5628, Mat & Genie Phys Lab, FR-38402 St Martin Dheres, France Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden.
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2001 (English)In: Materials Science Forum, Vols. 353-356, 2001, Vol. 353-3, 619-622 p.Conference paper, Published paper (Refereed)
Abstract [en]

Electrochemical etching experiments in combination with C-V measurements: of 6H and 4H-SiC p-type material can be used to determine the doping profile and the evaluation of the types and distribution of crystal defects. Dislocation-related etch-l,its appeared on the etched surfaces due to a preferential etching process. Doping profiles were obtained for etched depths down to 84 mum. The experiments were conducted in a simple commercial apparatus and the reproducibility of the method was demonstrated.

Place, publisher, year, edition, pages
2001. Vol. 353-3, 619-622 p.
Keyword [en]
C-V characteristics, doping profile, electrolytic etching, etch pit
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-49281OAI: oai:DiVA.org:liu-49281DiVA: diva2:270177
Conference
ECSCRM2000
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2010-12-08

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Yakimova, Rositsa

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