liu.seSearch for publications in DiVA
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Raman spectra of TiN/AlN superlattices
CNRS, LEPES, F-38042 Grenoble 9, France Fac Sci & Tech St Jerome, MATOP, CNRS, F-13397 Marseille, France Linkoping Univ, Dept Phys, S-58183 Linkoping, Sweden.
CNRS, LEPES, F-38042 Grenoble 9, France Fac Sci & Tech St Jerome, MATOP, CNRS, F-13397 Marseille, France Linkoping Univ, Dept Phys, S-58183 Linkoping, Sweden.
CNRS, LEPES, F-38042 Grenoble 9, France Fac Sci & Tech St Jerome, MATOP, CNRS, F-13397 Marseille, France Linkoping Univ, Dept Phys, S-58183 Linkoping, Sweden.
CNRS, LEPES, F-38042 Grenoble 9, France Fac Sci & Tech St Jerome, MATOP, CNRS, F-13397 Marseille, France Linkoping Univ, Dept Phys, S-58183 Linkoping, Sweden.
Show others and affiliations
2000 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 380, no 1-2, 252-255 p.Article in journal (Refereed) Published
Abstract [en]

TiN (4.5 nm)/AIN (3, 6, 22 nm) superlattices deposited by DC magnetron sputtering on MgO(001) at a temperature of 850 degreesC exhibit Raman signals. They indicate N and Ti vacancies (as in thick TiN) in TiN1-x layers (x = 3 +/- 2%). x is higher for the sample with 3-nm thick AIN layers, which is ascribed to N diffusion from AIN (standing close to the TiN interfaces) to TiN. In comparison to Raman peaks of thick ALN, there are split signals of wurzite ALN phase, and a signal from another phase, which might be defective rocksalt AIN standing close to the TiN interfaces. The Raman signals clearly show interactions between ALN and TiN layers. (C) 2000 Elsevier Science B.V. All rights reserved.

Place, publisher, year, edition, pages
2000. Vol. 380, no 1-2, 252-255 p.
Keyword [en]
SC/metal superlattices, nanometric layers, Raman, vacancies, TiN, AlN
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:liu:diva-49413OAI: oai:DiVA.org:liu-49413DiVA: diva2:270309
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-12

Open Access in DiVA

No full text

Authority records BETA

Birch, Jens

Search in DiVA

By author/editor
Birch, Jens
By organisation
Thin Film PhysicsThe Institute of Technology
In the same journal
Thin Solid Films
Natural Sciences

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 193 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • oxford
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf