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Micropipe healing in liquid phase epitaxial growth of SiC
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden TDI Inc, Gaithersburg, MD 20877 USA Howard Univ, MSRCE, Washington, DC 20059 USA.
Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden TDI Inc, Gaithersburg, MD 20877 USA Howard Univ, MSRCE, Washington, DC 20059 USA.
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2000 (English)In: Materials Science Forum, Vols. 338-342, Trans Tech Publications Inc., 2000, Vol. 338-3, 237-240 p.Conference paper, Published paper (Refereed)
Abstract [en]

In this study we demonstrate the feasibility of micropipe reduction in SiC commercial wafers by using liquid phase epitaxial (LPE) growth. We have studied the stability of the micropipe healing by performing hot KOH etching and growing thick (40-50 mum) layer with sublimation epitaxy at temperature higher than that used for the LPE growth. Experimental evidences have been collected by means of different techniques and a phenomenological model for micropipe healing is proposed.

Place, publisher, year, edition, pages
Trans Tech Publications Inc., 2000. Vol. 338-3, 237-240 p.
Series
Materials Science Forum, ISSN 1662-9752 ; 338-342
Keyword [en]
interfacial energy, liquid phase epitaxy, micropipe filling, SiC wafers
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-49435DOI: 10.4028/www.scientific.net/MSF.338-342.237ISBN: 9780878498543 (print)OAI: oai:DiVA.org:liu-49435DiVA: diva2:270331
Conference
First Nagaoka International Workshop on Magnesium Platform Science and Technology 2000, Nagaoka City, Japan, 27-29 July 2000
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2015-02-09

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Publisher's full texthttp://tdl.libra.titech.ac.jp/journaldocs/en/recordID/article.bib-01/ZR000000379823?hit=-1&caller=xc-searchhttp://swepub.kb.se/bib/swepub:oai:DiVA.org:liu-49435?vw=full&tab2=abs

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Yakimova, RositsaSyväjärvi, MikaelHenry, AnneJanzén, Erik

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