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Characterization of anisotropic step-bunching on as-grown SiC surfaces
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
2000 (English)In: Materials Science Forum, Vols. 338-343, Trans Tech Publications Inc., 2000, Vol. 338-3, 375-378 p.Conference paper, Published paper (Refereed)
Abstract [en]

We report the presence of anisotropic step-bunching in SiC epitaxy on off-oriented substrates. This is an effect of step-flow growth. The anisotropic step-bunching is discussed in relation to the temperature dependence of lateral growth velocities and the interface roughness. The macrostep appearance is probably related to formation of morphologically stable faces with low surface free energy.

Place, publisher, year, edition, pages
Trans Tech Publications Inc., 2000. Vol. 338-3, 375-378 p.
Series
Materials Science Forum, ISSN 1662-9752 ; 338-342
Keyword [en]
anisotropy, lateral growth, step bunching
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-49436DOI: 10.4028/www.scientific.net/MSF.338-342.375ISBN: 9780878498543 (print)ISBN: 0878498540 (print)OAI: oai:DiVA.org:liu-49436DiVA: diva2:270332
Conference
First Nagaoka International Workshop on Magnesium Platform Science and Technology 2000, Nagaoka City, Japan, 27-29, July 2000
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2014-12-18

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Publisher's full texthttp://tdl.libra.titech.ac.jp/journaldocs/en/recordID/article.bib-01/ZR000000379856?hit=-1&caller=xc-search

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Syväjärvi, MikaelYakimova, RositsaIakimov, TihomirJanzén, Erik

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Syväjärvi, MikaelYakimova, RositsaIakimov, TihomirJanzén, Erik
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CiteExportLink to record
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