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Photoluminescence study of CVD layers highly doped with nitrogen
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.ORCID iD: 0000-0001-5768-0244
Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden ABB Corp Res, SE-72178 Vasteras, Sweden Royal Inst Technol, SE-16440 Kista, Sweden.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
2000 (English)In: Materials Science Forum, Vols. 338-342, 2000, Vol. 338-342, 619-622 p.Conference paper, Published paper (Refereed)
Abstract [en]

From a systematic study of highly doped n-type 4H-SiC epilayers we observe a photoluminescence spectrum, which was previously associated with the recombination of a bound exciton at the neutral boron acceptor. Electrical measurements performed on these layers show clearly n-type conductivity. It was feasible to dope and measure reproducibly the layers from low 10(17) to mid 10(18) cm(-3). It was not possible to determine the doping from Capacitance Voltage measurements for the samples grown with the highest doping (>6.10(18) cm(-3)). However Secondary Ion Mass spectrometry did not reveal any boron impurities in the layers and shows good agreement with electrical measurements regarding the nitrogen concentration.

Place, publisher, year, edition, pages
2000. Vol. 338-342, 619-622 p.
Series
Materials Science Forum, ISSN 0255-5476 ; 338-342
Keyword [en]
Mott transition, n-type doping, photoluminescence
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-49440DOI: 10.4028/www.scientific.net/MSF.338-342.619ISBN: 0878498540 (print)OAI: oai:DiVA.org:liu-49440DiVA: diva2:270336
Conference
ICSCRM'99: 8th International Conference on Silicon Carbide and Related Materials, Research Triangle Park, North Carolina, USA, 10-15 October, 1999
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2015-02-26

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Forsberg, UrbanHenry, AnneJanzén, Erik

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