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Influence of epitaxial growth and substrate induced defects on the breakdown of high-voltage 4H-SiC Schottky diodes
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.
Linkoping Univ, Dept Phys & Measurement Technol, SE-58183 Linkoping, Sweden Linkoping Univ, IFM, ABB Corp Res, SE-58183 Linkoping, Sweden Univ Sci & Technol Lille, FR-59655 Villeneuve Dascq, France.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Semiconductor Materials.ORCID iD: 0000-0001-5768-0244
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2000 (English)In: Materials Science Forum(ISSN 0255-5476), Volume 338-3, Scientific.Net , 2000, Vol. 338-3, 1175-1178 p.Conference paper, Published paper (Refereed)
Abstract [en]

The influence of morphological and structural defects on high-voltage 4H-SiC Schottky diodes was studied. Micropipes were found as severely limiting the breakdown voltage of 4H-SiC power devices, where as carrot-like defects did not influence the value of breakdown voltage. The screw dislocation density as determined by X-ray topography analysis under the active area of the diode was also found to directly affect the breakdown voltage value. Only diodes with low density of screw dislocations and free from micropipes could block 2 kV or higher.

Place, publisher, year, edition, pages
Scientific.Net , 2000. Vol. 338-3, 1175-1178 p.
Series
Materials Science Forum, ISSN 1662-9752 ; 338-342
Keyword [en]
dislocation, epitaxial defects, Schottky diodes
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-49458DOI: 10.4028/www.scientific.net/MSF.338-342.1175ISBN: 0878498540 (print)OAI: oai:DiVA.org:liu-49458DiVA: diva2:270354
Conference
ICSCRM'99: 8th International Conference on Silicon Carbide and Related Materials, Research Triangle Park, North Carolina, USA, October 10-15, 1999
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2015-01-27

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Wahab, Qamar UlHallin, ChristerHenry, AnneJanzén, Erik

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