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High temperature gas sensors based on catalytic metal field effect transistors
Linkoping Univ, S SENCE, SE-58183 Linkoping, Sweden Linkoping Univ, Div Appl Phys, SE-58183 Linkoping, Sweden.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Physics .
Linkoping Univ, S SENCE, SE-58183 Linkoping, Sweden Linkoping Univ, Div Appl Phys, SE-58183 Linkoping, Sweden.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Physics .
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2000 (English)In: Materials Science Forum, ISSN 0255-5476, E-ISSN 1662-9752, Vol. 338-3, 1435-1438 p.Article in journal (Refereed) Published
Abstract [en]

Catalytic metal insulator silicon carbide field effect devices, MISiCFET, have been developed as gas sensitive devices. They functioned in a corrosive atmosphere of hydrogen / oxygen alternating pulses up to 775 degreesC. At 600 degreesC some devices operated with full gas response to hydrogen for 17 hours. Below a temperature of 500 degreesC the gas response of the devices was very stable with no base line drift for several days. MISiC Schottky diodes have been used for cylinder specific monitoring of an engine and exhausts and flue gas diagnosis. The MISiCFET devices will increase the number of possible applications for FET gas sensor devices.

Place, publisher, year, edition, pages
2000. Vol. 338-3, 1435-1438 p.
Keyword [en]
catalytic metal, gas sensors, high temperature, MOSFET
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:liu:diva-49460OAI: oai:DiVA.org:liu-49460DiVA: diva2:270356
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-12

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Unéus, LarsLundström, IngemarEkedahl, Lars-GunnarLloyd-Spets, Anita

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