Thermal decomposition products in arc evaporated TiAlN/TiN multilayers
2008 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 93, no 14, 143110- p.Article in journal (Refereed) Published
Cubic metastable Ti0.34Al0.66 N/TiN multilayers were grown by reactive arc evaporation using Ti33-Al67 and Ti cathodes in a N2 atmosphere. X-ray diffractometry and high resolution transmission electron microscopy revealed that metastable c-Ti 0.34Al0.66N partly decomposes after annealing at 900 °C into c-TiN rich and c-AlN rich phases with retained lattice coherency. Elemental mapping by energy dispersive x-ray spectroscopy showed a homogenous distribution of Ti and Al in the as-deposited 25 nm Ti0.34Al 0.66N layers. The annealed Ti0.34Al0.66N layers exhibited coherent 5 nm domains with high Al content surrounded by a high Ti content matrix. This nanostructure formation is discussed in terms of spinodal decomposition. © 2008 American Institute of Physics.
Place, publisher, year, edition, pages
2008. Vol. 93, no 14, 143110- p.
National CategoryEngineering and Technology
IdentifiersURN: urn:nbn:se:liu:diva-49543DOI: 10.1063/1.2998588OAI: oai:DiVA.org:liu-49543DiVA: diva2:270439