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Self-organization in porous 6H-SiC
Univ Nebraska, Ctr Microelect & Opt Mat Res, Lincoln, NE 68588 USA Univ Nebraska, Dept Elect Engn, Lincoln, NE 68588 USA Linkoping Univ, Dept Phys & Measurement Technol, Lab Appl Opt, SE-58183 Linkoping, Sweden.
Univ Nebraska, Ctr Microelect & Opt Mat Res, Lincoln, NE 68588 USA Univ Nebraska, Dept Elect Engn, Lincoln, NE 68588 USA Linkoping Univ, Dept Phys & Measurement Technol, Lab Appl Opt, SE-58183 Linkoping, Sweden.
Linköping University, The Institute of Technology. Linköping University, Department of Physics, Chemistry and Biology, Applied Optics .ORCID iD: 0000-0001-9229-2028
2000 (English)In: Journal of Materials Research, ISSN 0884-2914, E-ISSN 2044-5326, Vol. 15, no 9, 1860-1863 p.Article in journal (Refereed) Published
Abstract [en]

Pores in porous 6H-SiC were found to propagate first nearly parallel with the basal plane and gradually change direction and align with the c axis. As a consequence, well-defined columnar pores were formed. It was shown that the rate of change of propagation directions was influenced by the etching parameters, such as hydrofluoric acid concentration and current density. Larger currents resulted in formation of larger pores. Pore sizes were found to increase with depth due to a decrease of the acid concentration. In addition, due to chemical etching effects, larger pore sizes were obtained close to the sample surface.

Place, publisher, year, edition, pages
2000. Vol. 15, no 9, 1860-1863 p.
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Engineering and Technology
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URN: urn:nbn:se:liu:diva-49603OAI: oai:DiVA.org:liu-49603DiVA: diva2:270499
Available from: 2009-10-11 Created: 2009-10-11 Last updated: 2017-12-12

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